From this web site
Introduction into electrons, their interactions with matter and the signals utilized in electron microscopy (download pdf-file).
semi-automatic determination of particle size distributions
is possible with ImageJ
(download pdf-file ).
From external web sites
Introductions into TEM and SEM by B. Hafner (pdf-files).
lot of software useful in electron microscopy can be downloaded
from the elmiX page of the RWTH Aachen.
Alignment of TEM and STEM by J. Rodenburg (on-line Tutorials).
For a selection of recommended books and articles about electron microscopy, see literature.