Electron Microscopes

A pool of different electron microscopes with various configurations is installed at the ETH Hönggerberg. The properties of the electron microscopes that offer the most useful methods for solving problems in solid state chemistry and material science are presented below. A complete list of all microscopes of the EMEZ can be found here.

TEM

Tecnai F30

Field emission gun (FEG), acceleration voltage V_acc= 300kV,
SuperTwin lens: C_s = 1.15 mm, point resolution ≈ 0.2 nm

Equipment: Gatan imaging filter (GIF), SlowScan CCD camera, EDXS detector (EDAX), HAADF detector

Methods: TEM, HRTEM, EDXS, EELS, ESI, EFTEM, STEM

Manufacturer: FEI, Eindhoven

STEM

HD-2700CS

Cold field emission gun (FEG), acceleration voltage V_acc= 200kV,
CEOS corrector system, resolution < 0.1 nm

Equipment: BF and ADF detectors, secondary electron detector,, Gatan Orius CCD camera, Gatan EEL spectrometer, EDXS detector (EDAX)

Methods: BF- and DF-STEM, SEM, EDXS, EELS

Manufacturer: Hitachi, Düsseldorf

First results

Leo 1530 Gemini

Field emission gun (FEG), acceleration voltage V_acc= 0.2 - 30 kV,
resolution: 1.0 nm at 20 kV, 2.5 nm at 1 kV, 5 nm at 0.2 kV

Detectors: Inlens, conventional SE, BSE

Methods: SEM, HRSEM

Manufacturer: Zeiss, Oberkochen

Quanta 200

Field emission gun (FEG), acceleration voltage V_acc= 2 - 30 kV,

Detectors: SE, BSE, EDAX EDXS and EBSD

Methods: SEM, EDXS, EBSD, high and low vacuum modes

Manufacturer: FEI, Eindhoven