electron microscopy
 

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Electron Microscopes

A pool of different electron microscopes with various configurations is installed at the ETH Hönggerberg. The properties of the electron microscopes that offer the most useful methods for solving problems in solid state chemistry and material science are presented below. A complete list of all microscopes of the ScopeM can be found here.

 

TEM

Tecnai F30

Field emission gun (FEG), acceleration voltage Vacc= 300kV,
SuperTwin lens: Cs = 1.15 mm, point resolution ≈ 0.2 nm

Equipment: Gatan imaging filter (GIF), SlowScan CCD camera, EDXS detector (EDAX), HAADF detector
Methods: TEM, HRTEM, EDXS, EELS, ESI, EFTEM, STEM
Manufacturer: Thermo Fisher Scientific (FEI), Eindhoven

 

Talos F200X

High brightness field emission gun (XFEG), acceleration voltage Vacc= 200kV,
point resolution ≈ 0.16 nm

Equipment: 4 EDXS detectors (Bruker), Ceta CMOS camera, BF, ADF and HAADF STEM detectors
Methods: TEM, HRTEM, EDXS, STEM
Manufacturer: Thermo Fisher Scientific (FEI), Eindhoven

 

JEM-ARM300F "GrandARM"

Cold field emission gun (FEG), acceleration voltage Vacc= 300kV,
double-corrected system, point resolution ≈ 0.08 nm in TEM and STEM mode

Equipment: BF and ADF detectors, secondary electron detector, Gatan OneView camera, Gatan EEL spectrometer, EDXS detector (JEOL), various in-situ options
Methods: HRTEM, BF- and DF-TEM and STEM, ABF-STEM, HAADF-STEM, SEM, EDXS, EELS, in-situ studies
Manufacturer: JEOL, München

 

STEM

HD-2700CS

Cold field emission gun (FEG), acceleration voltage Vacc= 200kV,
CEOS corrector system, resolution < 0.1 nm

Equipment: BF and ADF detectors, secondary electron detector, Gatan Orius CCD camera, Gatan EEL spectrometer, EDXS detector (EDAX)
Methods: BF- and DF-STEM, SEM, EDXS, EELS
Manufacturer: Hitachi, Düsseldorf

Results

SEM

Leo 1530 Gemini

Field emission gun (FEG), acceleration voltage Vacc= 0.2 - 30 kV

Detectors: Inlens, conventional SE, BSE
Methods: SEM, HRSEM
Manufacturer: Zeiss, Oberkochen

 

Magellan 400

Field emission gun (FEG), acceleration voltage Vacc= 0.05 - 30 kV,

Detectors: SE, BSE, and BF- and ADF-STEM
Methods: SEM, STEM
Manufacturer: Thermo Fisher Scientific (FEI), Eindhoven

 

Quanta 200

Field emission gun (FEG), acceleration voltage Vacc= 2 - 30 kV,

Detectors: SE, BSE, EDXS and EBSD (EDAX)
Methods: SEM, EDXS, EBSD, high and low vacuum modes
Manufacturer: Thermo Fisher Scientific (FEI), Eindhoven

 

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